The compositions of SF6-Cu gas mixture at temperatures of 300-50,000 K are calculated based on Gibbs free energy minimization. The predominant particles with high molar fractions are determined in the cases of 1% Cu, 10% Cu, and 50% Cu. It is found that SF6 and F are generally the predominant particles in the temperature ranges of 300 K-1000 K and 1000 K-10,000 K respectively. While at temperatures of 10,000 K-50,000 K, electrons become the predominant particle.